Inventor · disambiguated record
Vladimir Volynets
Also filed as: VOLYNETS VLADIMIR
7 granted patents·5 pending applications·15 citations·filing 2005–2018
76Inventor score
Top patents by PatentIndex Score
12 records- 0174US10249485B2Pulsed plasma analyzer and method for analyzing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 2, 2019·2 cites·19 claims
- 0273US7253572B2Electromagnetic induced accelerator based on coil-turn modulationSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Aug 7, 2007·4 cites·7 claims
- 0372US7309961B2Driving frequency modulation system and method for plasma acceleratorSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Dec 18, 2007·9 cites·12 claims
- 0452US9865474B2Etching method using plasma, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 9, 2018·0 cites·12 claims
- 0547US2010048003A1Plasma processing apparatus and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2009·Application pending·0 cites
- 0643US10418250B2Etching method using remote plasma source, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 17, 2019·0 cites·17 claims
- 0742US2008289576A1Plasma based ion implantation systemSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0841US9520301B2Etching method using plasma, and method of fabricating semiconductor device including the etching methodKIM GO-JUN·Filed 2015·Granted Dec 13, 2016·0 cites·18 claims
- 0941US2008023653A1Plasma based ion implantation apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 1039US7804250B2Apparatus and method to generate plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Sep 28, 2010·0 cites·36 claims
- 1139US2006108931A1Electromagnetic accelerator having nozzle partSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 1238US2008032427A1Ion analysis system based on analyzer of ion energy distribution using retarded electric fieldSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
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