Inventor · disambiguated record
Chris Franciscus Jessica Lodewijk
Also filed as: LODEWIJK CHRIS FRANCISCUS JESSICA
6 granted patents·23 citations·filing 2012–2023
80Inventor score
Top patents by PatentIndex Score
6 records- 0195US10987705B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2020·Granted Apr 27, 2021·4 cites·20 claims
- 0294US9981293B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted May 29, 2018·9 cites·29 claims
- 0392US11738376B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2021·Granted Aug 29, 2023·2 cites·20 claims
- 0488US10632509B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2018·Granted Apr 28, 2020·4 cites·31 claims
- 0583US12202019B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 0671US9224580B2Plasma generatorMAPPER LITHOGRAPHY IP BV·Filed 2012·Granted Dec 29, 2015·4 cites·19 claims
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