Inventor · disambiguated record
Ming-Hwa Yoo
Also filed as: YOO MING-HWA
6 granted patents·1 pending application·72 citations·filing 2000–2003
83Inventor score
Files withTAIWAN SEMICONDUCTOR MFG7
Top patents by PatentIndex Score
7 records- 0180US6479098B1Method to solve particle performance of FSG layer by using UFU season film for FSG processTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Nov 12, 2002·20 cites·21 claims
- 0276US6815007B1Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season filmTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 9, 2004·14 cites·24 claims
- 0374US6759347B1Method of forming in-situ SRO HDP-CVD barrier filmTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jul 6, 2004·20 cites·21 claims
- 0468US6703317B1Method to neutralize charge imbalance following a wafer cleaning processTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 9, 2004·14 cites·20 claims
- 0557US6815072B2Method to solve particle performance of FSG layer by using UFU season film for FSG processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 9, 2004·2 cites·10 claims
- 0651US6602560B2Method for removing residual fluorine in HDP-CVD chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 5, 2003·2 cites·16 claims
- 0737US2005009367A1Novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (FSG) filmTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
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