Inventor

SREENIVASAN SIDLGATA V

US145 patents

⚠️ This page may combine multiple inventors who share the name “SREENIVASAN SIDLGATA V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SREENIVASAN SIDLGATA V

MOLECULAR IMPRINTS INC

Method of forming stepped structures employing imprint lithography

Compliant hard template for UV imprinting

Step and repeat imprint lithography processes

Alignment systems for imprint lithography

Alignment methods for imprint lithography

Step and repeat imprint lithography systems

Method to arrange features on a substrate to replicate features having minimal dimensional variability

Positive tone bi-layer imprint lithography method

Imprint lithography template having opaque alignment marks

Method for modulating shapes of substrates

Method for imprint lithography using an electric field

Chucking system for modulating shapes of substrates

Method for expelling gas positioned between a substrate and a mold

Method of forming a recessed structure employing a reverse tone process

Conforming template for patterning liquids disposed on substrates

Systems for magnification and distortion correction for imprint lithography processes

Method for fabricating bulbous-shaped vias

System for determining characteristics of substrates employing fluid geometries

Method for determining characteristics of substrate employing fluid geometries

System for varying dimensions of a substrate during nanoscale manufacturing

Apparatus to vary dimensions of a substrate during nano-scale manufacturing

Chucking system for modulating shapes of substrates

Imprinting of partial fields at the edge of the wafer

Capillary imprinting technique

Method and system for double-sided patterning of substrates

Patterning substrates employing multiple chucks

Pattern reversal employing thick residual layers

Capillary imprinting technique

Method of forming a compliant template for UV imprinting

Positive tone bi-layer imprint lithography method

System for dispensing liquids

Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom

Reverse tone patterning on surfaces having planarity perturbations

UNIV TEXAS

Apparatus to control displacement of a body spaced-apart from a surface

High precision orientation alignment and gap control stages for imprint lithography processes

Method of aligning a template with a substrate employing moire patterns

High-resolution overlay alignment methods for imprint lithography

Method of varying template dimensions to achieve alignment during imprint lithography

Imprint lithography template comprising alignment marks

Imprint lithography template having a feature size under 250 nm

Method for fabricating nanoscale patterns in light curable compositions using an electric field

Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks

Method of determining alignment of a template and a substrate having a liquid disposed therebetween

Method of orientating a template with respect to a substrate in response to a force exerted on the template

Apparatus to orientate a body with respect to a surface

Dual wavelength method of determining a relative position of a substrate and a template

Method of separating a template from a substrate during imprint lithography

Versatile process for precision nanoscale manufacturing

Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy

SREENIVASAN SIDLGATA V

Forming a layer on a substrate