Inventor · disambiguated record
Mikichi Ban
Also filed as: BAN MIKICHI
22 granted patents·878 citations·filing 1979–2001
97Inventor score
Files withCANON KK22
Top patents by PatentIndex Score
22 records- 0193US6012966APrecision polishing apparatus with detecting meansCANON KK·Filed 1997·Granted Jan 11, 2000·118 cites·59 claims
- 0292US5087121ADepth/height measuring deviceCANON KK·Filed 1990·Granted Feb 11, 1992·84 cites·37 claims
- 0392US4294538AImage forming optical systemCANON KK·Filed 1980·Granted Oct 13, 1981·61 cites·7 claims
- 0490US6004187AMethod and apparatus for measuring film thickness and film thickness distribution during polishingCANON KK·Filed 1997·Granted Dec 21, 1999·115 cites·11 claims
- 0590US4322130APhase shifting mirrorCANON KK·Filed 1979·Granted Mar 30, 1982·46 cites·8 claims
- 0688US6142855APolishing apparatus and polishing methodCANON KK·Filed 1998·Granted Nov 7, 2000·67 cites·6 claims
- 0784US6776691B2Polishing/cleaning method as well as method of making a wiring section using a polishing apparatusCANON KK·Filed 2001·Granted Aug 17, 2004·26 cites·5 claims
- 0880US6551172B1Polishing apparatus and polishing methodCANON KK·Filed 2000·Granted Apr 22, 2003·19 cites·46 claims
- 0980US4711576AWave front aberration measuring apparatusCANON KK·Filed 1986·Granted Dec 8, 1987·40 cites·15 claims
- 1076US6332835B1Polishing apparatus with transfer arm for moving polished object without drying itCANON KK·Filed 1998·Granted Dec 25, 2001·40 cites·9 claims
- 1173US6503361B1Polishing method and polishing apparatus using the sameCANON KK·Filed 1998·Granted Jan 7, 2003·34 cites·19 claims
- 1273US4850709AFabri-perot spectroscopy method and apparatus utilizing the sameCANON KK·Filed 1987·Granted Jul 25, 1989·33 cites·9 claims
- 1371US6137575AFilm thickness measuring method and apparatusCANON KK·Filed 1998·Granted Oct 24, 2000·35 cites·31 claims
- 1467US4787749AMethod and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the filmCANON KK·Filed 1986·Granted Nov 29, 1988·23 cites·8 claims
- 1563US6093081APolishing method and polishing apparatus using the sameCANON KK·Filed 1997·Granted Jul 25, 2000·27 cites·18 claims
- 1663US5904611APrecision polishing apparatusCANON KK·Filed 1997·Granted May 18, 1999·20 cites·11 claims
- 1761US6165050AMethod of manufacturing semiconductor device using precision polishing apparatus with detecting meansCANON KK·Filed 1999·Granted Dec 26, 2000·22 cites·5 claims
- 1861US6149500APrecision polishing method using hermetically sealed chambersCANON KK·Filed 1999·Granted Nov 21, 2000·18 cites·4 claims
- 1960US6629882B2Precise polishing apparatus and methodCANON KK·Filed 2001·Granted Oct 7, 2003·6 cites·48 claims
- 2057US6038068AAberration correction system and astronomical telescope having the sameCANON KK·Filed 1997·Granted Mar 14, 2000·24 cites·26 claims
- 2150US6390903B1Precise polishing apparatus and methodCANON KK·Filed 1998·Granted May 21, 2002·13 cites·38 claims
- 2243US4389084AObserving apparatusCANON KK·Filed 1980·Granted Jun 21, 1983·7 cites·4 claims
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