Inventor · disambiguated record
Shigeru Nakatsuka
Also filed as: NAKATSUKA SHIGERU
3 granted patents·2 pending applications·1 citations·filing 2020–2024
46Inventor score
Files withSANDISK TECHNOLOGIES LLC5
Top patents by PatentIndex Score
5 records- 0179US11598005B2Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the sameSANDISK TECHNOLOGIES LLC·Filed 2020·Granted Mar 7, 2023·1 cites·13 claims
- 0257US2025234553A1Method of selective bottom widening of high aspect ratio openings through a multi-layer stackSANDISK TECHNOLOGIES LLC·Filed 2024·Application pending·0 cites
- 0346US11551961B2Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the sameSANDISK TECHNOLOGIES LLC·Filed 2020·Granted Jan 10, 2023·0 cites·20 claims
- 0446US11538708B2Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the sameSANDISK TECHNOLOGIES LLC·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 0544US2021391154A1Anisotropic etch apparatus with local etch direction adjustment capability and methods for operating the sameSANDISK TECHNOLOGIES LLC·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →