Inventor · disambiguated record
Marco Adrianus Peter Van Den Heuvel
Also filed as: VAN DEN HEUVEL MARCO ADRIANUS PETER
7 granted patents·1 pending application·9 citations·filing 2009–2022
75Inventor score
Top patents by PatentIndex Score
8 records- 0177US9835957B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 5, 2017·5 cites·20 claims
- 0275US11846879B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2022·Granted Dec 19, 2023·0 cites·20 claims
- 0375US8384882B2Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrateASML NETHERLANDS BV·Filed 2009·Granted Feb 26, 2013·4 cites·20 claims
- 0471US11500296B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
- 0557US11175594B2Method of unloading an object from a support tableASML NETHERLANDS BV·Filed 2018·Granted Nov 16, 2021·0 cites·21 claims
- 0642US2023176487A1Substrate support system, lithographic apparatus and method of exposing a substrateASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0738US8154709B2Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatusALBERTI JOZEF AUGUSTINUS MARIA·Filed 2010·Granted Apr 10, 2012·0 cites·29 claims
- 0836US10656536B2Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted May 19, 2020·0 cites·20 claims
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