Inventor · disambiguated record
Eiki Endo
Also filed as: ENDO EIKI
2 granted patents·1 pending application·0 citations·filing 2011–2019
22Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0140US11569112B2Substrate processing apparatus and method of opening/closing lid of substrate accommodating vesselTOKYO ELECTRON LTD·Filed 2019·Granted Jan 31, 2023·0 cites·11 claims
- 0238US2022013385A1Substrate processing apparatus and substrate transport methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0325US9002494B2Substrate transfer method and storage mediumENDO EIKI·Filed 2011·Granted Apr 7, 2015·0 cites·4 claims
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