Inventor · disambiguated record
Chien-Mei Wang
Also filed as: WANG CHIEN-MEI
5 granted patents·1 pending application·271 citations·filing 1997–2002
83Inventor score
Top patents by PatentIndex Score
6 records- 0192US5858869AMethod for fabricating intermetal dielectric insulation using anisotropic plasma oxides and low dielectric constant polymersIND TECH RES INST·Filed 1997·Granted Jan 12, 1999·152 cites·20 claims
- 0282US6162583AMethod for making intermetal dielectrics (IMD) on semiconductor integrated circuits using low dielectric constant spin-on polymersIND TECH RES INST·Filed 1998·Granted Dec 19, 2000·89 cites·20 claims
- 0367US6406978B1Method of removing silicon carbideUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jun 18, 2002·11 cites·20 claims
- 0451US6621167B1Metal interconnect structureUNITED MICROELECTRONICS CORP·Filed 2002·Granted Sep 16, 2003·5 cites·18 claims
- 0548US6242361B1Plasma treatment to improve DUV photoresist processIND TECH RES INST·Filed 1999·Granted Jun 5, 2001·14 cites·19 claims
- 0635US2002187629A1Method for dual damascene process without using gap-filling materialsFiled 2001·Application pending·0 cites
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