Inventor · disambiguated record
Ruifang Shi
Also filed as: SHI RUIFANG
3 granted patents·30 citations·filing 2006–2010
69Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0191US7493590B1Process window optical proximity correctionKLA TENCOR TECH CORP·Filed 2006·Granted Feb 17, 2009·17 cites·37 claims
- 0285US8103086B2Reticle defect inspection with model-based thin line approachesSHI RUIFANG·Filed 2010·Granted Jan 24, 2012·7 cites·28 claims
- 0383US8611637B2Wafer plane detection of lithographically significant contamination photomask defectsSHI RUIFANG·Filed 2010·Granted Dec 17, 2013·6 cites·21 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →