Inventor · disambiguated record
Andrew Clark Serino
Also filed as: SERINO ANDREW CLARK
2 granted patents·2 pending applications·0 citations·filing 2018–2022
22Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0149US2023260759A1Integration of vapor deposition process into plasma etch reactorLAM RES CORP·Filed 2021·Application pending·0 cites
- 0248US12488992B2High aspect ratio dielectric etch with chlorineLAM RES CORP·Filed 2021·Granted Dec 2, 2025·0 cites·17 claims
- 0348US2024429063A1Silicon etch with organochlorideLAM RES CORP·Filed 2022·Application pending·0 cites
- 0436US10847375B2Selective atomic layer etchingLAM RES CORP·Filed 2018·Granted Nov 24, 2020·0 cites·10 claims
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