Inventor · disambiguated record
Hideki Ina
Also filed as: INA HIDEKI
114 granted patents·34 pending applications·2,164 citations·filing 1983–2024
99Inventor score
Top patents by PatentIndex Score
148 records- 0197US4814829AProjection exposure apparatusCANON KK·Filed 1987·Granted Mar 21, 1989·162 cites·43 claims
- 0296US4861162AAlignment of an objectCANON KK·Filed 1988·Granted Aug 29, 1989·110 cites·10 claims
- 0395US7794222B2Mold, pattern forming method, and pattern forming apparatusCANON KK·Filed 2006·Granted Sep 14, 2010·28 cites·5 claims
- 0493US7173716B2Alignment apparatus, exposure apparatus using the same, and method of manufacturing devicesCANON KK·Filed 2005·Granted Feb 6, 2007·15 cites·16 claims
- 0592US8845317B2Alignment method, imprint method, alignment apparatus, and position measurement methodSUEHIRA NOBUHITO·Filed 2007·Granted Sep 30, 2014·15 cites·9 claims
- 0692US7884935B2Pattern transfer apparatus, imprint apparatus, and pattern transfer methodCANON KK·Filed 2007·Granted Feb 8, 2011·12 cites·9 claims
- 0792US7510388B2Mold, imprint method, and process for producing chipCANON KK·Filed 2006·Granted Mar 31, 2009·16 cites·18 claims
- 0892US7148973B2Position detecting method and apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Dec 12, 2006·12 cites·12 claims
- 0992US7103497B2Position detecting device and position detecting methodCANON KK·Filed 2005·Granted Sep 5, 2006·12 cites·3 claims
- 1092US5148214AAlignment and exposure apparatusCANON KK·Filed 1991·Granted Sep 15, 1992·80 cites·34 claims
- 1191US5309197AProjection exposure apparatusCANON KK·Filed 1992·Granted May 3, 1994·76 cites·11 claims
- 1291US4952060AAlignment method and a projection exposure apparatus using the sameCANON KK·Filed 1990·Granted Aug 28, 1990·78 cites·20 claims
- 1390US9046793B2Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methodsSUEHIRA NOBUHITO·Filed 2011·Granted Jun 2, 2015·7 cites·12 claims
- 1490US6559924B2Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factoryCANON KK·Filed 2001·Granted May 6, 2003·37 cites·13 claims
- 1590US4883359AAlignment method and pattern forming method using the sameCANON KK·Filed 1988·Granted Nov 28, 1989·57 cites·2 claims
- 1690US4645924AObservation apparatus with selective light diffusionCANON KK·Filed 1983·Granted Feb 24, 1987·48 cites·24 claims
- 1789US9625836B2Interferometer, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Apr 18, 2017·10 cites·19 claims
- 1889US6151120AExposure apparatus and methodCANON KK·Filed 1998·Granted Nov 21, 2000·74 cites·33 claims
- 1989US4901109AAlignment and exposure apparatusCANON KK·Filed 1989·Granted Feb 13, 1990·58 cites·6 claims
- 2089US4634240AOptical apparatus using polarized lightCANON KK·Filed 1984·Granted Jan 6, 1987·49 cites·15 claims
- 2188US6992780B2Position detecting method and apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Jan 31, 2006·26 cites·14 claims
- 2287US7385700B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2005·Granted Jun 10, 2008·8 cites·20 claims
- 2387US6639677B1Position measuring method and position measuring system using the sameCANON KK·Filed 2000·Granted Oct 28, 2003·27 cites·11 claims
- 2487US6636311B1Alignment method and exposure apparatus using the sameCANON KK·Filed 1999·Granted Oct 21, 2003·63 cites·5 claims
- 2587US5160957AAlignment and exposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·52 cites·27 claims
- 2686US7771905B2Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Aug 10, 2010·9 cites·6 claims
- 2786US5048967ADetection optical system for detecting a pattern on an objectCANON KK·Filed 1990·Granted Sep 17, 1991·49 cites·19 claims
- 2886US4834540AProjection exposure apparatusCANON KK·Filed 1987·Granted May 30, 1989·44 cites·16 claims
- 2985US6992767B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2003·Granted Jan 31, 2006·21 cites·29 claims
- 3085US6493065B2Alignment system and alignment method in exposure apparatusCANON KK·Filed 2001·Granted Dec 10, 2002·28 cites·31 claims
- 3185US5659384APosition detection apparatus and methodCANON KK·Filed 1996·Granted Aug 19, 1997·68 cites·30 claims
- 3285US5133603ADevice for observing alignment marks on a mask and waferCANON KK·Filed 1991·Granted Jul 28, 1992·48 cites·31 claims
- 3384US9039402B2Imprinting apparatus and method thereforKAWAKAMI EIGO·Filed 2009·Granted May 26, 2015·7 cites·7 claims
- 3484US7981304B2Process for producing a chip using a moldCANON KK·Filed 2009·Granted Jul 19, 2011·6 cites·5 claims
- 3584US7247868B2Position detection method and apparatusCANON KK·Filed 2005·Granted Jul 24, 2007·6 cites·5 claims
- 3684US6521889B1Dust particle inspection apparatus, and device manufacturing method using the sameCANON KK·Filed 2000·Granted Feb 18, 2003·25 cites·15 claims
- 3783US8770958B2Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane directionSUEHIRA NOBUHITO·Filed 2010·Granted Jul 8, 2014·3 cites·4 claims
- 3883US4886974AMark detecting device for detecting the center of a mark by detecting its edgesCANON KK·Filed 1989·Granted Dec 12, 1989·33 cites·11 claims
- 3982US8047828B2Imprint apparatus, imprint method, and mold for imprintCANON KK·Filed 2006·Granted Nov 1, 2011·5 cites·7 claims
- 4081US9122149B2Imprint apparatus and method of manufacturing articleSATO HIROSHI·Filed 2011·Granted Sep 1, 2015·3 cites·5 claims
- 4181US8973495B2Imprint apparatus, imprint method, and article manufacturing methodKASUMI KAZUYUKI·Filed 2009·Granted Mar 10, 2015·8 cites·10 claims
- 4281US6980872B2Information providing method and systemCANON KK·Filed 2001·Granted Dec 27, 2005·25 cites·4 claims
- 4380US7443493B2Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatusCANON KK·Filed 2007·Granted Oct 28, 2008·5 cites·7 claims
- 4480US6999893B2Position detecting device and position detecting methodCANON KK·Filed 2003·Granted Feb 14, 2006·14 cites·1 claims
- 4580US6563573B1Method of evaluating imaging performanceCANON KK·Filed 1999·Granted May 13, 2003·44 cites·9 claims
- 4679US6785583B2Management system and apparatus, method therefor, and device manufacturing methodCANON KK·Filed 2003·Granted Aug 31, 2004·19 cites·28 claims
- 4779US5323207AProjection exposure apparatusCANON KK·Filed 1993·Granted Jun 21, 1994·34 cites·18 claims
- 4879US5137363AProjection exposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·37 cites·4 claims
- 4977US7643961B2Position detecting device and position detecting methodCANON KK·Filed 2006·Granted Jan 5, 2010·3 cites·14 claims
- 5077US7229566B2Position detecting method and apparatusCANON KK·Filed 2003·Granted Jun 12, 2007·15 cites·8 claims
Showing the top 50 of 148 patent records by PatentIndex Score.
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