Inventor · disambiguated record
Masao Kosugi
Also filed as: KOSUGI MASAO
36 granted patents·1,150 citations·filing 1977–1999
98Inventor score
Top patents by PatentIndex Score
36 records- 0197US4814829AProjection exposure apparatusCANON KK·Filed 1987·Granted Mar 21, 1989·162 cites·43 claims
- 0292US4937618AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1989·Granted Jun 26, 1990·57 cites·3 claims
- 0391US4776462AContainer for a sheet-like articleCANON KK·Filed 1986·Granted Oct 11, 1988·64 cites·6 claims
- 0490US4786947AProjection exposure apparatusCANON KK·Filed 1987·Granted Nov 22, 1988·115 cites·8 claims
- 0587US5160957AAlignment and exposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·52 cites·27 claims
- 0686US5053670APrecision actuatorCANON KK·Filed 1990·Granted Oct 1, 1991·47 cites·14 claims
- 0784US4676631ADevice for adjusting projection magnificationCANON KK·Filed 1986·Granted Jun 30, 1987·36 cites·13 claims
- 0883US4179794AProcess of manufacturing semiconductor devicesNIPPON MUSICAL INSTRUMENTS MFG·Filed 1978·Granted Dec 25, 1979·40 cites·10 claims
- 0981US4823012AStep and repeat exposure apparatus having improved system for aligningCANON KK·Filed 1987·Granted Apr 18, 1989·31 cites·12 claims
- 1081US4506977ATransfer apparatus provided with an auto-focusing mechanismCANON KK·Filed 1983·Granted Mar 26, 1985·33 cites·15 claims
- 1180US4488806AShot arranging method in a divisional printing apparatusCANON KK·Filed 1982·Granted Dec 18, 1984·31 cites·3 claims
- 1279US5137363AProjection exposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·37 cites·4 claims
- 1379US5050111AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1990·Granted Sep 17, 1991·31 cites·7 claims
- 1477US4757355AMask storing mechanismCANON KK·Filed 1986·Granted Jul 12, 1988·27 cites·9 claims
- 1576US5262822AExposure method and apparatusCANON KK·Filed 1992·Granted Nov 16, 1993·30 cites·45 claims
- 1675US4888614AObservation system for a projection exposure apparatusCANON KK·Filed 1989·Granted Dec 19, 1989·24 cites·43 claims
- 1772US4521082AExposure apparatusCANON KK·Filed 1982·Granted Jun 4, 1985·26 cites·11 claims
- 1870US4441853ADisc orienting deviceCANON KK·Filed 1983·Granted Apr 10, 1984·32 cites·2 claims
- 1969US4843563AStep-and-repeat alignment and exposure method and apparatusCANON KK·Filed 1988·Granted Jun 27, 1989·29 cites·25 claims
- 2068US4719357ASemiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignmentCANON KK·Filed 1987·Granted Jan 12, 1988·20 cites·13 claims
- 2167US4775877AMethod and apparatus for processing a plate-like workpieceCANON KK·Filed 1986·Granted Oct 4, 1988·34 cites·23 claims
- 2264US6144504AProjection and exposure apparatus including an optical member and a holding memberCANON KK·Filed 1999·Granted Nov 7, 2000·25 cites·16 claims
- 2362US5120134AExposure system including a device for analyzing an affect of a wafer resist upon a mark signalCANON KK·Filed 1991·Granted Jun 9, 1992·17 cites·7 claims
- 2458US5386269AAlignment and exposure apparatusCANON KK·Filed 1994·Granted Jan 31, 1995·14 cites·14 claims
- 2558US4179110AMethod for opposing a sheet-like material to a standard plane with predetermined space therebetweenCANON KK·Filed 1977·Granted Dec 18, 1979·13 cites·2 claims
- 2657US5365342AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1993·Granted Nov 15, 1994·28 cites·21 claims
- 2756US4530587AStep type mask alignerCANON KK·Filed 1983·Granted Jul 23, 1985·13 cites·11 claims
- 2855US4910679AStep-and-repeat alignment and exposure method and apparatusCANON KK·Filed 1989·Granted Mar 20, 1990·17 cites·3 claims
- 2953US4648708APattern transfer apparatusCANON KK·Filed 1985·Granted Mar 10, 1987·10 cites·12 claims
- 3053US4617469AExposure apparatus with detecting means insertable into an exposure pathCANON KK·Filed 1983·Granted Oct 14, 1986·17 cites·19 claims
- 3148US4106044AField effect transistor having unsaturated characteristicsNIPPON MUSICAL INSTRUMENTS MFG·Filed 1977·Granted Aug 8, 1978·10 cites·12 claims
- 3247US4627010AMethod and device for discriminating stillness of a step exposure apparatusCANON KK·Filed 1983·Granted Dec 2, 1986·13 cites·8 claims
- 3341US4682037AProjection exposure apparatus having an alignment light of a wavelength other than that of the exposure lightCANON KK·Filed 1985·Granted Jul 21, 1987·5 cites·13 claims
- 3436US4271577AAlignment deviceCANON KK·Filed 1979·Granted Jun 9, 1981·4 cites·2 claims
- 3534US4479711AMask alignerCANON KK·Filed 1982·Granted Oct 30, 1984·3 cites·4 claims
- 3633US5999270AProjection exposure apparatus and microdevice manufacturing method using the sameCANON KK·Filed 1996·Granted Dec 7, 1999·3 cites·19 claims
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