Inventor · disambiguated record
Thomas Morgenstern
Also filed as: MORGENSTERN THOMAS
4 granted patents·2 pending applications·28 citations·filing 2001–2003
74Inventor score
Top patents by PatentIndex Score
6 records- 0163US6593242B2Process for planarization and recess etching of integrated circuitsSEMICONDUCTOR 300 GMBH & CO KG·Filed 2002·Granted Jul 15, 2003·12 cites·14 claims
- 0255US6852639B2Etching processing method for a material layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Feb 8, 2005·7 cites·29 claims
- 0348US6984556B2Method of forming an isolation layer and method of manufacturing a trench capacitorINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jan 10, 2006·3 cites·15 claims
- 0444US6855596B2Method for manufacturing a trench capacitor having an isolation trenchINFINEON TECHNOLOGIES AG·Filed 2003·Granted Feb 15, 2005·6 cites·13 claims
- 0532US2002177323A1Gate etch process for 12 inch wafersFiled 2001·Application pending·0 cites
- 0629US2003010750A1Method for determining the endpoint of etch process stepsFiled 2002·Application pending·0 cites
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