Inventor · disambiguated record
Hiroshi Makihira
Also filed as: MAKIHIRA HIROSHI
18 granted patents·1,019 citations·filing 1977–2002
96Inventor score
Files withHITACHI LTD18
Top patents by PatentIndex Score
18 records- 0193US4343553AShape testing apparatusHITACHI LTD·Filed 1980·Granted Aug 10, 1982·57 cites·6 claims
- 0292US4226539ACylindrical body appearance inspection apparatusHITACHI LTD·Filed 1977·Granted Oct 7, 1980·57 cites·17 claims
- 0391US4410278AMethod and apparatus for appearance inspectionHITACHI LTD·Filed 1980·Granted Oct 18, 1983·79 cites·15 claims
- 0490US6674890B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2000·Granted Jan 6, 2004·41 cites·10 claims
- 0590US6169282B1Defect inspection method and apparatus thereforHITACHI LTD·Filed 1998·Granted Jan 2, 2001·107 cites·32 claims
- 0690US5153444AMethod and apparatus for detecting patternsHITACHI LTD·Filed 1991·Granted Oct 6, 1992·92 cites·26 claims
- 0789US4791586AMethod of and apparatus for checking geometry of multi-layer patterns for IC structuresHITACHI LTD·Filed 1985·Granted Dec 13, 1988·99 cites·30 claims
- 0889US4472056AShape detecting apparatusHITACHI LTD·Filed 1981·Granted Sep 18, 1984·48 cites·6 claims
- 0988US4403294ASurface defect inspection systemHITACHI LTD·Filed 1980·Granted Sep 6, 1983·61 cites·12 claims
- 1087US5649022APattern checking method and checking apparatusHITACHI LTD·Filed 1992·Granted Jul 15, 1997·79 cites·43 claims
- 1187US5430548AMethod and apparatus for pattern detectionHITACHI LTD·Filed 1993·Granted Jul 4, 1995·70 cites·7 claims
- 1286US4725722AAutomatic focusing method and apparatus utilizing contrasts of projected patternHITACHI LTD·Filed 1986·Granted Feb 16, 1988·57 cites·12 claims
- 1385US7221486B2Method and apparatus for picking up 2D image of an object to be sensedHITACHI LTD·Filed 2002·Granted May 22, 2007·33 cites·17 claims
- 1485US4213117AMethod and apparatus for detecting positions of chips on a semiconductor waferHITACHI LTD·Filed 1978·Granted Jul 15, 1980·49 cites·11 claims
- 1569US4614430AMethod of detecting pattern defect and its apparatusHITACHI LTD·Filed 1984·Granted Sep 30, 1986·40 cites·7 claims
- 1664US4556797AMethod and apparatus for detecting edge of fine pattern on specimenHITACHI LTD·Filed 1983·Granted Dec 3, 1985·11 cites·3 claims
- 1758US6507417B1Method and apparatus for picking up 2D image of an object to be sensedHITACHI LTD·Filed 1998·Granted Jan 14, 2003·23 cites·7 claims
- 1849US6317512B1Pattern checking method and checking apparatusHITACHI LTD·Filed 1996·Granted Nov 13, 2001·16 cites·49 claims
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