Inventor · disambiguated record
Andrew Judge
Also filed as: JUDGE ANDREW
5 granted patents·2 pending applications·28 citations·filing 1985–2025
70Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0180US2025314958A1Contaminant identification metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2025·Application pending·0 cites
- 0279USD292445SVehicle steering wheel trayJUDGE ANDREW·Filed 1985·Granted Oct 27, 1987·27 cites·1 claims
- 0376US2024103386A1Apparatus and method for determining a condition associated with a pellicleASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0470US11550231B2Apparatus for and method of in-situ particle removal in a lithography apparatusASML HOLDING NV·Filed 2019·Granted Jan 10, 2023·1 cites·19 claims
- 0565US12379655B2Contaminant identification metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2021·Granted Aug 5, 2025·0 cites·17 claims
- 0660US11906907B2Apparatus and method for determining a condition associated with a pellicleASML NETHERLANDS BV·Filed 2018·Granted Feb 20, 2024·0 cites·20 claims
- 0742US11422478B2Control of reticle placement for defectivity optimizationASML HOLDING NV·Filed 2018·Granted Aug 23, 2022·0 cites·25 claims
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