Inventor · disambiguated record

Hiroyuki Miyagishi

Also filed as: MIYAGISHI HIROYUKI

1 granted patent·0 citations·filing 2019–2019

5Inventor score

Technology areasH10P

Files withKOKUSAI ELECTRIC CORP1

Top patents by PatentIndex Score

1 record

0138US11814725B2Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Nov 14, 2023·0 cites·20 claims

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