Inventor · disambiguated record
H. Frederick Woods
Also filed as: WOODS H FREDERICK
4 granted patents·256 citations·filing 2000–2002
83Inventor score
Technology areasH10P
Files withSEMITOOL INC4
Top patents by PatentIndex Score
4 records- 0196US6286231B1Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2000·Granted Sep 11, 2001·178 cites·56 claims
- 0290US6357142B1Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2001·Granted Mar 19, 2002·43 cites·53 claims
- 0383US6745494B2Method and apparatus for processing wafers under pressureSEMITOOL INC·Filed 2002·Granted Jun 8, 2004·21 cites·21 claims
- 0477US6543156B2Method and apparatus for high-pressure wafer processing and dryingSEMITOOL INC·Filed 2002·Granted Apr 8, 2003·14 cites·49 claims
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