Inventor · disambiguated record
Yuexing Zhao
Also filed as: ZHAO YUEXING
10 granted patents·1 pending application·247 citations·filing 1997–2003
91Inventor score
Top patents by PatentIndex Score
11 records- 0192US6303551B1Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper filmLAM RES CORP·Filed 2000·Granted Oct 16, 2001·55 cites·7 claims
- 0284US6162301AMethods and apparatus for cleaning semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 1999·Granted Dec 19, 2000·56 cites·15 claims
- 0380US6165956AMethods and apparatus for cleaning semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 1997·Granted Dec 26, 2000·46 cites·1 claims
- 0472US6479443B1Cleaning solution and method for cleaning semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 2000·Granted Nov 12, 2002·15 cites·5 claims
- 0569US6927198B2Methods and apparatus for cleaning semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 2003·Granted Aug 9, 2005·9 cites·26 claims
- 0666US6552812B1Method and system for measuring threshold lengthLAM RES CORP·Filed 2000·Granted Apr 22, 2003·13 cites·36 claims
- 0764US7079354B1Planar magnetic headHITACHI GLOBAL STORAGE TECH·Filed 2000·Granted Jul 18, 2006·4 cites·8 claims
- 0863US6294027B1Methods and apparatus for cleaning semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 1999·Granted Sep 25, 2001·26 cites·16 claims
- 0958US6593282B1Cleaning solutions for semiconductor substrates after polishing of copper filmLAM RES CORP·Filed 1998·Granted Jul 15, 2003·21 cites·11 claims
- 1056US6949200B2Planar magnetic head and fabrication method thereforHITACHI GLOBAL STORAGE TECH·Filed 2003·Granted Sep 27, 2005·2 cites·10 claims
- 1140US2002077260A1Cleaning solution and method for cleaning semiconductor substrates after polishing of copper filmFiled 2001·Application pending·0 cites
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