Inventor · disambiguated record

Robert Heberlein

Also filed as: HEBERLEIN ROBERT

1 granted patent·8 citations·filing 2015–2015

31Inventor score

Technology areasH01J

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0184US9336983B2Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscopeZEISS CARL SMT GMBH·Filed 2015·Granted May 10, 2016·8 cites·20 claims

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