Inventor · disambiguated record
Tasuku Yano
Also filed as: YANO TASUKU
5 granted patents·1 pending application·7 citations·filing 2008–2021
68Inventor score
Top patents by PatentIndex Score
6 records- 0173US8735814B2Electron beam deviceSOHDA YASUNARI·Filed 2011·Granted May 27, 2014·3 cites·16 claims
- 0268US9644955B2Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using sameHITACHI HIGH TECH CORP·Filed 2012·Granted May 9, 2017·2 cites·12 claims
- 0365US7928384B2Localized static charge distribution precision measurement method and deviceHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 19, 2011·2 cites·8 claims
- 0453US7714288B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 11, 2010·0 cites·17 claims
- 0551US9312091B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Apr 12, 2016·0 cites·11 claims
- 0647US2021319336A1Material property prediction method and material property prediction deviceHITACHI LTD·Filed 2021·Application pending·0 cites
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