Inventor · disambiguated record
Leonard Lublin
Also filed as: LUBLIN LEONARD
4 granted patents·2 pending applications·191 citations·filing 2001–2004
81Inventor score
Files withCYMER INC4
Top patents by PatentIndex Score
6 records- 0195US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0294US6563128B2Base stabilization systemCYMER INC·Filed 2002·Granted May 13, 2003·55 cites·14 claims
- 0393US6704339B2Lithography laser with beam delivery and beam pointing controlCYMER INC·Filed 2002·Granted Mar 9, 2004·50 cites·80 claims
- 0458US6791098B2Multi-input, multi-output motion control for lithography systemCYMER INC·Filed 2001·Granted Sep 14, 2004·8 cites·10 claims
- 0534US2004189145A1Method and device for vibration controlFiled 2004·Application pending·0 cites
- 0632US2003040818A1Method and device for vibration controlFiled 2002·Application pending·0 cites
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