Inventor · disambiguated record
Kosaburo Matsumura
Also filed as: MATSUMURA KOSABURO
2 granted patents·136 citations·filing 1989–1995
68Inventor score
Files withTOSOH CORP2
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2 records- 0191US5212043APhotoresist composition comprising a non-aromatic resin having no aromatic structures derived from units of an aliphatic cyclic hydrocarbon and units of maleic anhydride and/or maleimide and a photosensitive agentTOSOH CORP·Filed 1989·Granted May 18, 1993·117 cites·19 claims
- 0258US5677380APlanarizing material and planarizing methodTOSOH CORP·Filed 1995·Granted Oct 14, 1997·19 cites·20 claims
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