Inventor · disambiguated record
Toshio Sawano
Also filed as: SAWANO TOSHIO
1 granted patent·1 pending application·8 citations·filing 2001–2016
30Inventor score
Top patents by PatentIndex Score
2 records- 0157US6773853B2Semiconductor device manufacture method with exposure process using small exposure amount, and reticle set for semiconductor device manufactureFUJITSU LTD·Filed 2001·Granted Aug 10, 2004·8 cites·24 claims
- 0222US2017221777A1Method of manufacturing semiconductor device and method of forming maskMIE FUJITSU SEMICONDUCTOR LTD·Filed 2016·Application pending·0 cites
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