Inventor · disambiguated record
Tomoko Owada
Also filed as: OWADA TOMOKO
14 granted patents·1 pending application·54 citations·filing 2017–2024
89Inventor score
Files withEBARA CORP15
Top patents by PatentIndex Score
15 records- 0189US11179823B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2017·Granted Nov 23, 2021·3 cites·19 claims
- 0289USD839224SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Jan 29, 2019·28 cites·1 claims
- 0387US11958163B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2021·Granted Apr 16, 2024·1 cites·16 claims
- 0483USD918161SElastic membraneEBARA CORP·Filed 2018·Granted May 4, 2021·1 cites·1 claims
- 0580US11088011B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2018·Granted Aug 10, 2021·2 cites·13 claims
- 0673USD989012SElastic membraneEBARA CORP·Filed 2021·Granted Jun 13, 2023·4 cites·1 claims
- 0766USD859332SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Sep 10, 2019·10 cites·1 claims
- 0865US12068189B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2021·Granted Aug 20, 2024·0 cites·4 claims
- 0961US2024351161A1Polishing method and polishing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 1059US11745306B2Polishing apparatus and method of controlling inclination of stationary ringEBARA CORP·Filed 2019·Granted Sep 5, 2023·0 cites·7 claims
- 1156USD913977SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2018·Granted Mar 23, 2021·5 cites·1 claims
- 1252US11654524B2Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatusEBARA CORP·Filed 2020·Granted May 23, 2023·0 cites·6 claims
- 1346US11731235B2Polishing apparatus and polishing methodEBARA CORP·Filed 2019·Granted Aug 22, 2023·0 cites·2 claims
- 1445USD1021832SElastic membraneEBARA CORP·Filed 2023·Granted Apr 9, 2024·0 cites·1 claims
- 1530USD981969SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2021·Granted Mar 28, 2023·0 cites·1 claims
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