Inventor · disambiguated record
Thorsten Rassel
Also filed as: RASSEL THORSTEN
13 granted patents·1 pending application·50 citations·filing 2002–2015
90Inventor score
Top patents by PatentIndex Score
14 records- 0187US8885143B2Projection exposure apparatus for microlithography for the production of semiconductor componentsFISCHER JUERGEN·Filed 2011·Granted Nov 11, 2014·7 cites·26 claims
- 0287US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 0386US7961294B2Imaging device in a projection exposure facilityZEISS CARL SMT GMBH·Filed 2008·Granted Jun 14, 2011·6 cites·21 claims
- 0484US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0578US7304717B2Imaging device in a projection exposure facilityZEISS CARL SMT AG·Filed 2002·Granted Dec 4, 2007·12 cites·21 claims
- 0676US9341807B2Gravitation compensation for optical elements in projection exposure apparatusesZEISS CARL SMT GMBH·Filed 2014·Granted May 17, 2016·3 cites·32 claims
- 0770US9041910B2Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuatorZEISS CARL SMT GMBH·Filed 2013·Granted May 26, 2015·1 cites·20 claims
- 0865US7548387B2Optical imaging deviceZEISS CARL SMT AG·Filed 2006·Granted Jun 16, 2009·4 cites·20 claims
- 0961US8854603B2Gravitation compensation for optical elements in projection exposure apparatusesMUEHLBERGER NORBERT·Filed 2011·Granted Oct 7, 2014·1 cites·20 claims
- 1058US9513562B2Projection exposure apparatus for microlithography for the production of semiconductor componentsZEISS CARL SMT GMBH·Filed 2014·Granted Dec 6, 2016·0 cites·29 claims
- 1158US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1256US8810934B2Positioning method for an optical arrangement of a projection illumination systemAUBELE KARL-EUGEN·Filed 2011·Granted Aug 19, 2014·1 cites·20 claims
- 1355US9298101B2Multi facet mirror of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Mar 29, 2016·0 cites·21 claims
- 1450US8514371B2Imaging device in a projection exposure facilityHUMMEL WOLFGANG·Filed 2011·Granted Aug 20, 2013·0 cites·20 claims
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