Inventor · disambiguated record
Frank Marianek
Also filed as: MARIANEK FRANK
2 granted patents·18 citations·filing 2000–2007
59Inventor score
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2 records- 0174US8068279B2Optical system of an illumination device of a projection exposure apparatusSCHUSTER KARL-HEINZ·Filed 2007·Granted Nov 29, 2011·10 cites·39 claims
- 0262US6441975B1Device for the low-deformation support of an optical element and method for the low-deformation support of the optical elementZEISS STIFTUNG·Filed 2000·Granted Aug 27, 2002·8 cites·10 claims
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