Inventor · disambiguated record

Katsuhisa Mita

Also filed as: MITA KATSUHISA

3 granted patents·96 citations·filing 1996–1998

76Inventor score

Technology areasH10P

Files withTOSHIBA KK3

Top patents by PatentIndex Score

3 records

0180US5817178AApparatus for baking photoresist applied on substrateTOSHIBA KK·Filed 1996·Granted Oct 6, 1998·57 cites·16 claims
0263US6051371AMethod for baking photoresist applied on substrateTOSHIBA KK·Filed 1998·Granted Apr 18, 2000·25 cites·14 claims
0351US6033474AApparatus for baking photoresist applied on substrateTOSHIBA KK·Filed 1998·Granted Mar 7, 2000·14 cites·18 claims

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