Inventor · disambiguated record
Ichiro Kanomata
Also filed as: KANOMATA ICHIRO
9 granted patents·311 citations·filing 1976–1983
91Inventor score
Files withHITACHI LTD9
Top patents by PatentIndex Score
9 records- 0191US4101411APlasma etching apparatusHITACHI LTD·Filed 1977·Granted Jul 18, 1978·33 cites·7 claims
- 0289US4393333AMicrowave plasma ion sourceHITACHI LTD·Filed 1980·Granted Jul 12, 1983·38 cites·6 claims
- 0389US4330384AProcess for plasma etchingHITACHI LTD·Filed 1979·Granted May 18, 1982·52 cites·28 claims
- 0487US4409520AMicrowave discharge ion sourceHITACHI LTD·Filed 1981·Granted Oct 11, 1983·29 cites·8 claims
- 0585US4058748AMicrowave discharge ion sourceHITACHI LTD·Filed 1976·Granted Nov 15, 1977·23 cites·13 claims
- 0684US4462863AMicrowave plasma etchingHITACHI LTD·Filed 1983·Granted Jul 31, 1984·59 cites·12 claims
- 0782US4298419ADry etching apparatusHITACHI LTD·Filed 1980·Granted Nov 3, 1981·39 cites·4 claims
- 0876US4316090AMicrowave plasma ion sourceHITACHI LTD·Filed 1980·Granted Feb 16, 1982·17 cites·8 claims
- 0959US4430138AMicrowave plasma etching apparatus having fan-shaped dischargeHITACHI LTD·Filed 1980·Granted Feb 7, 1984·21 cites·1 claims
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