Inventor · disambiguated record
Mitsugu Sato
Also filed as: SATO MITSUGU
129 granted patents·6 pending applications·1,875 citations·filing 1989–2021
99Inventor score
Top patents by PatentIndex Score
135 records- 0199US6538249B1Image-formation apparatus using charged particle beams under various focus conditionsHITACHI LTD·Filed 2000·Granted Mar 25, 2003·118 cites·36 claims
- 0298US7582885B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 1, 2009·61 cites·5 claims
- 0398US6875984B2Bio electron microscope and observation method of specimenHITACHI LTD·Filed 2003·Granted Apr 5, 2005·105 cites·14 claims
- 0495US7615765B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 10, 2009·23 cites·20 claims
- 0595US7449690B2Inspection method and inspection apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 11, 2008·28 cites·20 claims
- 0695US7381968B2Charged particle beam apparatus and specimen holderHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 3, 2008·28 cites·10 claims
- 0795US7339167B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 4, 2008·29 cites·20 claims
- 0895US7075078B2Scanning electron microscopeHITACHI LTD·Filed 2005·Granted Jul 11, 2006·20 cites·12 claims
- 0995US6838667B2Method and apparatus for charged particle beam microscopyHITACHI LTD·Filed 2001·Granted Jan 4, 2005·59 cites·17 claims
- 1093US7214936B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2005·Granted May 8, 2007·15 cites·9 claims
- 1193US7109485B2Charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Sep 19, 2006·19 cites·5 claims
- 1293US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 1393US6348690B1Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 1998·Granted Feb 19, 2002·51 cites·30 claims
- 1492US7462828B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 9, 2008·18 cites·30 claims
- 1592US6787772B2Scanning electron microscopeHITACHI LTD·Filed 2001·Granted Sep 7, 2004·32 cites·15 claims
- 1692US5608218AScanning electron microscopeHITACHI LTD·Filed 1994·Granted Mar 4, 1997·69 cites·22 claims
- 1791US7928377B2Charged particle beam apparatus and sample manufacturing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 19, 2011·14 cites·13 claims
- 1891US7112792B2Defect inspection and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 26, 2006·16 cites·16 claims
- 1991US6791084B2Method and scanning electron microscope for measuring dimension of material on sampleHITACHI HIGH TECH CORP·Filed 2002·Granted Sep 14, 2004·51 cites·7 claims
- 2090US7807980B2Charged particle beam apparatus and methods for capturing images using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 5, 2010·11 cites·7 claims
- 2190US7642514B2Charged particle beam apparatusHITACHI LTD·Filed 2007·Granted Jan 5, 2010·14 cites·8 claims
- 2290US7282722B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 16, 2007·10 cites·10 claims
- 2390US6653633B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Nov 25, 2003·22 cites·7 claims
- 2489US8153969B2Inspection method and inspection system using charged particle beamFUKADA ATSUKO·Filed 2008·Granted Apr 10, 2012·16 cites·7 claims
- 2589US7442929B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 28, 2008·10 cites·20 claims
- 2689US7355177B2Electron beam deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 8, 2008·11 cites·18 claims
- 2789US7355174B2Charged particle beam emitting device and method for adjusting the optical axisHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 8, 2008·10 cites·8 claims
- 2889US7329868B2Charged particle beam apparatusHITACHI LTD·Filed 2006·Granted Feb 12, 2008·7 cites·3 claims
- 2989US6555816B1Scanning electron microscope and sample observation method using the sameHITACHI LTD·Filed 2000·Granted Apr 29, 2003·35 cites·12 claims
- 3089US5894124AScanning electron microscope and its analogous deviceHITACHI LTD·Filed 1997·Granted Apr 13, 1999·61 cites·28 claims
- 3189US4983832AScanning electron microscopeHITACHI LTD·Filed 1989·Granted Jan 8, 1991·40 cites·14 claims
- 3288US7408172B2Charged particle beam apparatus and charged particle beam irradiation methodHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 5, 2008·8 cites·10 claims
- 3388US6885001B2Scanning electron microscopeHITACHI LTD·Filed 2004·Granted Apr 26, 2005·20 cites·13 claims
- 3487US8629395B2Charged particle beam apparatusMORISHITA HIDEO·Filed 2011·Granted Jan 14, 2014·10 cites·17 claims
- 3587US7012252B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Mar 14, 2006·5 cites·12 claims
- 3686US9040911B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted May 26, 2015·8 cites·8 claims
- 3786US7888640B2Scanning electron microscope and method of imaging an object by using the scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 15, 2011·9 cites·8 claims
- 3886US7875849B2Electron beam apparatus and electron beam inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 25, 2011·7 cites·12 claims
- 3986US7435957B2Charged particle beam equipment and charged particle microscopyHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 14, 2008·8 cites·22 claims
- 4086US7340111B2Image evaluation method and microscopeHITACHI LTD·Filed 2005·Granted Mar 4, 2008·6 cites·5 claims
- 4186US7105816B2Electron beam deviceHITACHI HIGH TECH CORP·Filed 2004·Granted Sep 12, 2006·21 cites·5 claims
- 4286US7034296B2Method of forming a sample image and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2001·Granted Apr 25, 2006·24 cites·17 claims
- 4385US7973282B2Charged particle beam apparatus and dimension measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 5, 2011·6 cites·16 claims
- 4485US7348559B2Defect inspection and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 25, 2008·6 cites·18 claims
- 4585US7236651B2Image evaluation method and microscopeHITACHI LTD·Filed 2002·Granted Jun 26, 2007·16 cites·20 claims
- 4685US7022983B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Apr 4, 2006·15 cites·18 claims
- 4785US6627889B2Apparatus and method for observing sample using electron beamHITACHI LTD·Filed 2002·Granted Sep 30, 2003·21 cites·4 claims
- 4885US6555819B1Scanning electron microscopeHITACHI LTD·Filed 2000·Granted Apr 29, 2003·19 cites·22 claims
- 4985US6452178B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2001·Granted Sep 17, 2002·23 cites·16 claims
- 5084US7655906B2Method and apparatus for scanning and measurement by electron beamHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 2, 2010·13 cites·18 claims
Showing the top 50 of 135 patent records by PatentIndex Score.
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