Inventor · disambiguated record
Marc J. Postiglione
Also filed as: POSTIGLIONE MARC · POSTIGLIONE MARC J
4 granted patents·17 citations·filing 2000–2009
70Inventor score
Files withIBM4
Top patents by PatentIndex Score
4 records- 0182US7487054B2Automated dynamic metrology sampling system and method for process controlIBM·Filed 2005·Granted Feb 3, 2009·9 cites·7 claims
- 0271US7519216B1Systems and methods of maintaining equipment for manufacturing semiconductor devicesIBM·Filed 2008·Granted Apr 14, 2009·5 cites·1 claims
- 0355US7881891B2Automated dynamic metrology sampling system and method for process controlIBM·Filed 2009·Granted Feb 1, 2011·0 cites·12 claims
- 0441US6456953B1Method for correcting misalignment between a reticle and a stage in a step-and-repeat exposure systemIBM·Filed 2000·Granted Sep 24, 2002·3 cites·4 claims
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