Inventor · disambiguated record
Kathryn H. Varian
Also filed as: VARIAN KATHRYN H
5 granted patents·1 pending application·184 citations·filing 1997–2003
83Inventor score
Top patents by PatentIndex Score
6 records- 0183US5916010ACMP pad maintenance apparatus and methodIBM·Filed 1997·Granted Jun 29, 1999·87 cites·24 claims
- 0281US5880007APlanarization of a non-conformal device layer in semiconductor fabricationSIEMENS AG·Filed 1997·Granted Mar 9, 1999·59 cites·1 claims
- 0362US6001740APlanarization of a non-conformal device layer in semiconductor fabricationSIEMENS AG·Filed 1998·Granted Dec 14, 1999·24 cites·19 claims
- 0450US6797582B2Vertical thermal nitride mask (anti-collar) and processing thereofIBM·Filed 2003·Granted Sep 28, 2004·2 cites·10 claims
- 0545US6396160B1Fill strategies in the optical kerfIBM·Filed 1999·Granted May 28, 2002·12 cites·8 claims
- 0640US2003107111A1A 3-d microelectronic structure including a vertical thermal nitride maskIBM·Filed 2001·Application pending·0 cites
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