Inventor · disambiguated record
Paul S. Buccos
Also filed as: BUCCOS PAUL S
3 granted patents·2 pending applications·29 citations·filing 2004–2010
64Inventor score
Top patents by PatentIndex Score
5 records- 0180US6909102B1Ion implanter system, method and program product including particle detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jun 21, 2005·27 cites·17 claims
- 0260US7544254B2System and method for cleaning an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jun 9, 2009·2 cites·23 claims
- 0348US2008157007A1Active particle trapping for process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 0440US8461552B2Active particle trapping for process controlNUNAN PETER·Filed 2010·Granted Jun 11, 2013·0 cites·20 claims
- 0530US2006124155A1Technique for reducing backside particlesSUURONEN DAVID E·Filed 2005·Application pending·0 cites
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