Inventor · disambiguated record
Yuji Tange
Also filed as: TANGE YUJI
5 granted patents·21 citations·filing 1997–2009
76Inventor score
Top patents by PatentIndex Score
5 records- 0160US6246064B1Electron beam drawing apparatusHITACHI LTD·Filed 2000·Granted Jun 12, 2001·4 cites·4 claims
- 0259US8258472B2Charged particle radiation device and image capturing condition determining method using charged particle radiation deviceSHINDO TAMOTSU·Filed 2009·Granted Sep 4, 2012·4 cites·7 claims
- 0352US6337486B2Electron beam drawing process and electron beam drawing apparatusHITACHI LTD·Filed 2001·Granted Jan 8, 2002·2 cites·8 claims
- 0445US6127683AElectron beam drawing apparatusHITACHI LTD·Filed 1999·Granted Oct 3, 2000·7 cites·6 claims
- 0537US5972772AElectron beam drawing processHITACHI LTD·Filed 1997·Granted Oct 26, 1999·4 cites·4 claims
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