Inventor · disambiguated record
Tadamoto Tamai
Also filed as: TAMAI TADAMOTO
10 granted patents·342 citations·filing 1988–2004
91Inventor score
Top patents by PatentIndex Score
10 records- 0189US4904902AIon implanting systemSUMITOMO EATON NOVA·Filed 1988·Granted Feb 27, 1990·44 cites·10 claims
- 0285US5702228ARobotic arm supporting an object by interactive mechanismSUMITOMO HEAVY INDUSTRIES·Filed 1996·Granted Dec 30, 1997·92 cites·8 claims
- 0385US4914292AIon implanting apparatusSUMITOMO EATON NOVA·Filed 1988·Granted Apr 3, 1990·35 cites·8 claims
- 0473US5512106ASurface cleaning with argonSUMITOMO HEAVY INDUSTRIES·Filed 1994·Granted Apr 30, 1996·66 cites·26 claims
- 0567US5046992ARobot arm capable of three-dimensionally moving a robot arm memberSUMITOMO EATON NOVA·Filed 1990·Granted Sep 10, 1991·44 cites·6 claims
- 0657US6313469B1Substrate handling apparatus and ion implantation apparatusEBARA CORP·Filed 1999·Granted Nov 6, 2001·22 cites·2 claims
- 0754US5929456AIon implantation system and method adapted for serial wafer processingEBARA CORP·Filed 1997·Granted Jul 27, 1999·19 cites·15 claims
- 0851US4994674AIon implantation apparatus capable of avoiding electrification of a substrateSUMITOMO EATON NOVA·Filed 1990·Granted Feb 19, 1991·10 cites·7 claims
- 0947US7399154B2Vacuum processing system being able to carry process object into and out of vacuum chamberTAMAI TADAMOTO·Filed 2004·Granted Jul 15, 2008·4 cites·7 claims
- 1036US5030835AIon implantation capable of uniformly injecting an ion beam into a substrateSUMITOMO EATON NOVA·Filed 1989·Granted Jul 9, 1991·6 cites·4 claims
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