Inventor · disambiguated record
Il-Yong Jang
Also filed as: JANG IL-YONG
12 granted patents·1 pending application·25 citations·filing 2004–2021
86Inventor score
Top patents by PatentIndex Score
13 records- 0180US8592105B2Photomasks and methods of fabricating the sameJANG IL-YONG·Filed 2011·Granted Nov 26, 2013·4 cites·20 claims
- 0280US7560198B2Photo-mask having exposure blocking region and methods of designing and fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jul 14, 2009·6 cites·37 claims
- 0377US10955369B2Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methodsSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 23, 2021·1 cites·15 claims
- 0476US9989860B2Method of generating a pattern on a photomask using a plurality of beams and pattern generator for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jun 5, 2018·2 cites·14 claims
- 0576US7527901B2Method of repairing phase shift maskSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted May 5, 2009·5 cites·18 claims
- 0664US11353413B2Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methodsSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 7, 2022·0 cites·8 claims
- 0759US10474034B2Phase shift maskSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Nov 12, 2019·0 cites·9 claims
- 0857US7371484B2Photomask blank and method of fabricating a photomask from the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted May 13, 2008·7 cites·30 claims
- 0956US8865375B2Halftone phase shift blank photomasks and halftone phase shift photomasksSAMSUNG ELECTRONICS CO LTD·Filed 2012·Granted Oct 21, 2014·0 cites·19 claims
- 1050US9989857B2Photomask and method of forming the same and methods of manufacturing electronic device and display device using the photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 5, 2018·0 cites·10 claims
- 1147US10444619B2Mask blank and phase shift mask using sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Oct 15, 2019·0 cites·7 claims
- 1246US8329363B2Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasksJANG IL-YONG·Filed 2010·Granted Dec 11, 2012·0 cites·16 claims
- 1340US2006148263A1Dry etching apparatus having particle removing device and method of fabricating phase shift mask using the sameCHOI YO-HAN·Filed 2006·Application pending·0 cites
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