Inventor · disambiguated record
Seijiro Umemoto
Also filed as: UMEMOTO SEIJIRO
7 granted patents·2 pending applications·1,039 citations·filing 2002–2009
89Inventor score
Top patents by PatentIndex Score
9 records- 0198US7354873B2Method for forming insulation filmASM JAPAN·Filed 2006·Granted Apr 8, 2008·479 cites·40 claims
- 0296US7504344B2Method of forming a carbon polymer film using plasma CVDASM JAPAN·Filed 2005·Granted Mar 17, 2009·419 cites·31 claims
- 0394US6881683B2Insulation film on semiconductor substrate and method for forming sameASM JAPAN·Filed 2002·Granted Apr 19, 2005·51 cites·28 claims
- 0487US6784123B2Insulation film on semiconductor substrate and method for forming sameASM JAPAN·Filed 2003·Granted Aug 31, 2004·28 cites·19 claims
- 0586US6537928B1Apparatus and method for forming low dielectric constant filmASM JAPAN·Filed 2002·Granted Mar 25, 2003·33 cites·14 claims
- 0683US6830007B2Apparatus and method for forming low dielectric constant filmASM JAPAN·Filed 2002·Granted Dec 14, 2004·26 cites·15 claims
- 0768US7470633B2Method of forming a carbon polymer film using plasma CVDASM JAPAN·Filed 2006·Granted Dec 30, 2008·3 cites·15 claims
- 0846US2009277377A1Crucible for melting silicon and release agent used to the sameCOVALENT MATERIALS CORP·Filed 2009·Application pending·0 cites
- 0943US2006258176A1Method for forming insulation filmASM JAPAN·Filed 2006·Application pending·0 cites
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