Inventor · disambiguated record

Chitoshi Nogami

Also filed as: NOGAMI CHITOSHI

2 granted patents·45 citations·filing 1992–1994

64Inventor score

Technology areasC23C H10P

Files withIWATANI & CO1 TOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0155US5254176AMethod of cleaning a process tubeTOKYO ELECTRON LTD·Filed 1992·Granted Oct 19, 1993·30 cites·14 claims
0246US5421902ANon-plasma cleaning method for semiconductor manufacturing apparatusIWATANI & CO·Filed 1994·Granted Jun 6, 1995·15 cites·2 claims

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