Inventor · disambiguated record
Sylvia S. Tsao
Also filed as: TSAO SYLVIA S
3 granted patents·74 citations·filing 1988–1990
72Inventor score
Files withUS ENERGY3
Top patents by PatentIndex Score
3 records- 0177US5023200AFormation of multiple levels of porous silicon for buried insulators and conductors in silicon device technologiesUS ENERGY·Filed 1988·Granted Jun 11, 1991·56 cites·14 claims
- 0242US4995954APorous siliconformation and etching process for use in silicon micromachiningUS ENERGY·Filed 1990·Granted Feb 26, 1991·15 cites·8 claims
- 0330US5015346AElectrochemical method for defect delineation in silicon-on-insulator wafersUS ENERGY·Filed 1990·Granted May 14, 1991·3 cites·5 claims
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