Inventor · disambiguated record
Tatsuhiro Ueki
Also filed as: UEKI TATSUHIRO
4 granted patents·1 pending application·10 citations·filing 1999–2021
68Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
5 records- 0192US11640911B2Substrate processing method of controlling discharge angle and discharge position of processing liquid supplied to peripheral portion of substrateTOKYO ELECTRON LTD·Filed 2021·Granted May 2, 2023·2 cites·8 claims
- 0288US11244838B2Substrate processing apparatus and substrate processing method of controlling discharge angle and discharge position of processing liquid supplied to peripheral portion of substrateTOKYO ELECTRON LTD·Filed 2017·Granted Feb 8, 2022·6 cites·8 claims
- 0380US11776824B2Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 3, 2023·1 cites·22 claims
- 0465US10403518B2Substrate processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2016·Granted Sep 3, 2019·1 cites·5 claims
- 0527US2001022219A1Plate type heat pipe and its mounting structureFiled 1999·Application pending·0 cites
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