Inventor · disambiguated record
Alex Van Zon
Also filed as: VAN ZON ALEX
5 granted patents·1 pending application·31 citations·filing 2004–2010
76Inventor score
Top patents by PatentIndex Score
6 records- 0181US7746484B2Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2007·Granted Jun 29, 2010·7 cites·9 claims
- 0274US7889357B2Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2010·Granted Feb 15, 2011·2 cites·5 claims
- 0368US7012672B2Lithographic apparatus, system, method, computer program, and apparatus for height map analysisASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·20 cites·36 claims
- 0467US7684011B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Mar 23, 2010·2 cites·31 claims
- 0541US8330941B2Calibration method for a lithographic apparatusSCHOORMANS CAROLUS JOHANNES CATHARINA·Filed 2010·Granted Dec 11, 2012·0 cites·17 claims
- 0637US2011109889A1Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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