Inventor · disambiguated record
Hironobu Miya
Also filed as: MIYA HIRONOBU
12 granted patents·10 pending applications·77 citations·filing 2003–2013
90Inventor score
Files withHITACHI INT ELECTRIC INC12MIYA HIRONOBU6HITACHI KOKUSAI ELECTRONIC INC1HORITA TOMOKI1NISHITANI EISUKE1
Top patents by PatentIndex Score
22 records- 0193US7779785B2Production method for semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2006·Granted Aug 24, 2010·21 cites·3 claims
- 0292US8227346B2Method of producing semiconductor deviceMIYA HIRONOBU·Filed 2011·Granted Jul 24, 2012·12 cites·10 claims
- 0390US8039404B2Production method for semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2010·Granted Oct 18, 2011·9 cites·3 claims
- 0485US7767594B2Semiconductor device producing methodHITACHI INT ELECTRIC INC·Filed 2007·Granted Aug 3, 2010·9 cites·15 claims
- 0584US8105957B2Method of producing semiconductor deviceMIYA HIRONOBU·Filed 2009·Granted Jan 31, 2012·7 cites·12 claims
- 0681US7981815B2Semiconductor device producing method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2007·Granted Jul 19, 2011·8 cites·23 claims
- 0777US8641829B2Substrate processing systemHITACHI INT ELECTRIC INC·Filed 2013·Granted Feb 4, 2014·1 cites·3 claims
- 0876US8481434B2Method of manufacturing a semiconductor device and processing apparatusMIYA HIRONOBU·Filed 2008·Granted Jul 9, 2013·6 cites·15 claims
- 0967US7662727B2Method for manufacturing semiconductor device backgroundHITACHI INT ELECTRIC INC·Filed 2007·Granted Feb 16, 2010·2 cites·7 claims
- 1064US8506714B2Substrate processing systemHORITA TOMOKI·Filed 2007·Granted Aug 13, 2013·1 cites·8 claims
- 1163US7892983B2Substrate processing apparatus and producing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2005·Granted Feb 22, 2011·1 cites·3 claims
- 1253US2012258566A1Substrate processing apparatus, method for manufacturing solar battery, and method for manufacturing substrateNISHITANI EISUKE·Filed 2012·Application pending·0 cites
- 1349US2010087069A1Method of manufacturing semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2009·Application pending·0 cites
- 1447US2009071505A1Cleaning method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1547US2009163037A1Manufacturing method of semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1647US2009035951A1Manufacturing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1746US2010186774A1Cleaning method and substrate processing apparatusMIYA HIRONOBU·Filed 2008·Application pending·0 cites
- 1845US8058184B2Semiconductor device producing methodMIYA HIRONOBU·Filed 2010·Granted Nov 15, 2011·0 cites·2 claims
- 1945US2011045675A1Substrate processing apparatus and producing method of semiconductor deviceMIYA HIRONOBU·Filed 2010·Application pending·0 cites
- 2042US2006035470A1Method for manufaturing semiconductor device and substrate processing systemHITACHI KOKUSAI ELECTRONIC INC·Filed 2003·Application pending·0 cites
- 2142US2004018650A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2003·Application pending·0 cites
- 2237US2006240677A1Method for manufacturing semiconductor device and substrate processing apparatusSUSUMU HORITA·Filed 2003·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →