Inventor · disambiguated record
Mutsumi Tanikawa
Also filed as: TANIKAWA MUTSUMI
8 granted patents·160 citations·filing 1999–2016
88Inventor score
Top patents by PatentIndex Score
8 records- 0195US9108292B2Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatusEBARA CORP·Filed 2014·Granted Aug 18, 2015·19 cites·26 claims
- 0293US9156130B2Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 13, 2015·11 cites·20 claims
- 0389US6338671B1Apparatus for supplying polishing liquidEBARA CORP·Filed 2000·Granted Jan 15, 2002·41 cites·27 claims
- 0487US6358125B2Polishing liquid supply apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·39 cites·21 claims
- 0579US9469013B2Method and apparatus for conditioning a polishing padTANIKAWA MUTSUMI·Filed 2012·Granted Oct 18, 2016·6 cites·12 claims
- 0667US9533395B2Method and apparatus for conditioning a polishing padEBARA CORP·Filed 2016·Granted Jan 3, 2017·1 cites·12 claims
- 0767US6508695B2Pure water reusing systemEBARA CORP·Filed 2001·Granted Jan 21, 2003·12 cites·10 claims
- 0865US6280300B1Filter apparatusEBARA CORP·Filed 1999·Granted Aug 28, 2001·31 cites·19 claims
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