Inventor · disambiguated record
Shane Tang
Also filed as: TANG SHANE
9 granted patents·1,065 citations·filing 2013–2021
90Inventor score
Technology areasH10P
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0198US9875891B2Selective inhibition in atomic layer deposition of silicon-containing filmsLAM RES CORP·Filed 2017·Granted Jan 23, 2018·478 cites·15 claims
- 0298US9564312B2Selective inhibition in atomic layer deposition of silicon-containing filmsLAM RES CORP·Filed 2014·Granted Feb 7, 2017·415 cites·14 claims
- 0398US9502238B2Deposition of conformal films by atomic layer deposition and atomic layer etchLAM RES CORP·Filed 2015·Granted Nov 22, 2016·55 cites·17 claims
- 0496US10804099B2Selective inhibition in atomic layer deposition of silicon-containing filmsLAM RES CORP·Filed 2017·Granted Oct 13, 2020·13 cites·16 claims
- 0595US9589790B2Method of depositing ammonia free and chlorine free conformal silicon nitride filmLAM RES CORP·Filed 2014·Granted Mar 7, 2017·22 cites·21 claims
- 0695US9076646B2Plasma enhanced atomic layer deposition with pulsed plasma exposureLAM RES CORP·Filed 2013·Granted Jul 7, 2015·81 cites·19 claims
- 0772US11239420B2Conformal damage-free encapsulation of chalcogenide materialsLAM RES CORP·Filed 2018·Granted Feb 1, 2022·1 cites·17 claims
- 0866US11832533B2Conformal damage-free encapsulation of chalcogenide materialsLAM RES CORP·Filed 2021·Granted Nov 28, 2023·0 cites·15 claims
- 0948US12230495B2Method of depositing silicon nitride filmsLAM RES CORP·Filed 2019·Granted Feb 18, 2025·0 cites·17 claims
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