Inventor · disambiguated record
Kerstin Seibold
Also filed as: SEIBOLD KERSTIN
2 granted patents·7 citations·filing 2003–2003
45Inventor score
Files withINFINEON TECHNOLOGIES AG2
Top patents by PatentIndex Score
2 records- 0150US6890699B2Polymer material having a low glass transition temperature for use in chemically amplified photoresists for semiconductor productionINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 10, 2005·7 cites·12 claims
- 0228US6899997B2Process for modifying resist structures and resist films from the aqueous phaseINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 31, 2005·0 cites·19 claims
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