Inventor · disambiguated record
Kippei Sugita
Also filed as: SUGITA KIPPEI
26 granted patents·9 pending applications·474 citations·filing 2002–2022
94Inventor score
Top patents by PatentIndex Score
35 records- 0196US9903739B2Sensor chip for electrostatic capacitance measurement and measuring device having the sameTOKYO ELECTRON LTD·Filed 2016·Granted Feb 27, 2018·9 cites·10 claims
- 0294US9127358B2Film forming apparatusINOUE MITSUYA·Filed 2012·Granted Sep 8, 2015·423 cites·10 claims
- 0392US9841395B2System of inspecting focus ring and method of inspecting focus ringTOKYO ELECTRON LTD·Filed 2016·Granted Dec 12, 2017·8 cites·11 claims
- 0490US9163311B2Film forming apparatusHASEGAWA HARUNARI·Filed 2011·Granted Oct 20, 2015·16 cites·6 claims
- 0584US10948317B2Measuring device and method for obtaining amount of deviation of measuring deviceTOKYO ELECTRON LTD·Filed 2019·Granted Mar 16, 2021·4 cites·11 claims
- 0682US10354896B2Position detection system and processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jul 16, 2019·3 cites·15 claims
- 0780US10903100B2Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing systemTOKYO ELECTRON LTD·Filed 2018·Granted Jan 26, 2021·3 cites·8 claims
- 0878US10837991B2Electrostatic capacitance measuring deviceTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·2 cites·14 claims
- 0975US10074549B2Method for acquiring data indicating electrostatic capacitanceTOKYO ELECTRON LTD·Filed 2017·Granted Sep 11, 2018·2 cites·5 claims
- 1073US10018484B2Sensor chip for electrostatic capacitance measurement and measuring device having the sameTOKYO ELECTRON LTD·Filed 2018·Granted Jul 10, 2018·1 cites·10 claims
- 1171US10199251B2Position detecting system and processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Feb 5, 2019·1 cites·8 claims
- 1271US9349584B2Method for depositing a film and film deposition apparatusTOKYO ELECTRON LTD·Filed 2013·Granted May 24, 2016·2 cites·5 claims
- 1361US11380568B2Transfer method and transfer systemTOKYO ELECTRON LTD·Filed 2020·Granted Jul 5, 2022·0 cites·14 claims
- 1458US11735402B2Measurement method and measurement apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·13 claims
- 1557US11604097B2Calibration method and calibration systemTOKYO ELECTRON LTD·Filed 2021·Granted Mar 14, 2023·0 cites·17 claims
- 1656US10861729B2Transfer method and transfer systemTOKYO ELECTRON LTD·Filed 2019·Granted Dec 8, 2020·0 cites·7 claims
- 1755US2009294063A1Plasma processing apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 1854US11513194B2Ranging apparatus and method using the ranging apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 29, 2022·0 cites·3 claims
- 1951US11817335B2Method and system for inspecting processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Nov 14, 2023·0 cites·21 claims
- 2050US12198954B2Execution device and execution methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 14, 2025·0 cites·16 claims
- 2150US11869752B2System and method for transferring a focus ring into processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 9, 2024·0 cites·4 claims
- 2249US2022341844A1Calibration apparatus and calibration methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2348US11164729B2Measuring device and operation method of system for inspecting focus ringTOKYO ELECTRON LTD·Filed 2019·Granted Nov 2, 2021·0 cites·10 claims
- 2448US2011003078A1Apparatus for treating surface and method of treating surfaceTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2548US2021166960A1Jig, processing system and processing methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 2647US10964575B2Transfer robot system, teaching method and wafer receptacleTOKYO ELECTRON LTD·Filed 2019·Granted Mar 30, 2021·0 cites·14 claims
- 2745US2011023784A1EvaporatorKASHIWAGI YUSAKU·Filed 2010·Application pending·0 cites
- 2843US10837810B2Method for calibrating measuring device and case used in the calibration methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·0 cites·9 claims
- 2943US2016280536A1Method for Manufacturing Hollow StructureTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 3041US10634479B2Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrumentTOKYO ELECTRON LTD·Filed 2017·Granted Apr 28, 2020·0 cites·12 claims
- 3140US9708507B2Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing methodTOKYO ELECTRON LTD·Filed 2015·Granted Jul 18, 2017·0 cites·15 claims
- 3240US2002170678A1Plasma processing apparatusFiled 2002·Application pending·0 cites
- 3335US8716130B2Method of manufacturing semiconductor deviceSUGITA KIPPEI·Filed 2011·Granted May 6, 2014·0 cites·8 claims
- 3435US2012160169A1Film forming apparatusHASEGAWA HARUNARI·Filed 2011·Application pending·0 cites
- 3530US2012269970A1Cleaning method and film depositing methodIDO YASUYUKI·Filed 2012·Application pending·0 cites
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