Inventor · disambiguated record
Tomoharu Katagiri
Also filed as: KATAGIRI TOMOHARU
7 granted patents·319 citations·filing 1991–2004
89Inventor score
Top patents by PatentIndex Score
7 records- 0190US5627102AMethod for making metal interconnection with chlorine plasma etchKAWASAKI STEEL CO·Filed 1995·Granted May 6, 1997·89 cites·23 claims
- 0280US6063703AMethod for making metal interconnectionKAWASAKI STEEL CO·Filed 1998·Granted May 16, 2000·49 cites·54 claims
- 0380US5973402AMetal interconnection and method for makingKAWASAKI STEEL CO·Filed 1997·Granted Oct 26, 1999·48 cites·20 claims
- 0476US5290736AMethod of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmosphericKAWASAKI STEEL CO·Filed 1991·Granted Mar 1, 1994·62 cites·8 claims
- 0575US5952723ASemiconductor device having a multilevel interconnection structureKAWASAKI STEEL CO·Filed 1997·Granted Sep 14, 1999·42 cites·33 claims
- 0661US5637534AMethod of manufacturing semiconductor device having multilevel interconnection structureKAWASAKI STEEL CO·Filed 1993·Granted Jun 10, 1997·26 cites·64 claims
- 0744US7087974B2Semiconductor integrated circuit including anti-fuse and method for manufacturing the sameKAWASAKI MICROELECTRONICS INC·Filed 2004·Granted Aug 8, 2006·3 cites·18 claims
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