Inventor · disambiguated record
Bobby Kadkhodayan
Also filed as: KADKHODAYAN BOBBY
3 granted patents·1 pending application·209 citations·filing 2002–2013
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0193US8622021B2High lifetime consumable silicon nitride-silicon dioxide plasma processing componentsTAYLOR TRAVIS R·Filed 2008·Granted Jan 7, 2014·172 cites·8 claims
- 0289US8522716B2Protective coating for a plasma processing chamber part and a method of useKADKHODAYAN BOBBY·Filed 2009·Granted Sep 3, 2013·21 cites·16 claims
- 0371US6887340B2Etch rate uniformityLAM RES CORP·Filed 2002·Granted May 3, 2005·16 cites·9 claims
- 0451US2014065835A1Protective coating for a plasma processing chamber part and a method of useLAM RES CORP·Filed 2013·Application pending·0 cites
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