Inventor · disambiguated record
Masaru Nyui
Also filed as: NYUI MASARU
15 granted patents·454 citations·filing 1986–2006
94Inventor score
Top patents by PatentIndex Score
15 records- 0190US6004187AMethod and apparatus for measuring film thickness and film thickness distribution during polishingCANON KK·Filed 1997·Granted Dec 21, 1999·115 cites·11 claims
- 0288US6142855APolishing apparatus and polishing methodCANON KK·Filed 1998·Granted Nov 7, 2000·67 cites·6 claims
- 0380US6551172B1Polishing apparatus and polishing methodCANON KK·Filed 2000·Granted Apr 22, 2003·19 cites·46 claims
- 0479US5359193ATalbot's interference type optical encoderCANON KK·Filed 1993·Granted Oct 25, 1994·34 cites·7 claims
- 0577US5481106AEncoder with an optical scale and interference of zero and first order diffraction beamsCANON KK·Filed 1993·Granted Jan 2, 1996·32 cites·6 claims
- 0673US6503361B1Polishing method and polishing apparatus using the sameCANON KK·Filed 1998·Granted Jan 7, 2003·34 cites·19 claims
- 0771US6137575AFilm thickness measuring method and apparatusCANON KK·Filed 1998·Granted Oct 24, 2000·35 cites·31 claims
- 0871US6120349APolishing systemCANON KK·Filed 1997·Granted Sep 19, 2000·32 cites·17 claims
- 0963US6093081APolishing method and polishing apparatus using the sameCANON KK·Filed 1997·Granted Jul 25, 2000·27 cites·18 claims
- 1061US5640377ARotation information detecting apparatus and methodCANON KK·Filed 1995·Granted Jun 17, 1997·15 cites·4 claims
- 1155US5302821AEncoder using a birefringent element and a system including the sameCANON KK·Filed 1992·Granted Apr 12, 1994·14 cites·16 claims
- 1250US5369271ARotation detector using dual position interference lightCANON KK·Filed 1994·Granted Nov 29, 1994·12 cites·42 claims
- 1347US7916273B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Mar 29, 2011·0 cites·7 claims
- 1442US5559602ARotation measuring apparatus and displacement measuring apparatusCANON KK·Filed 1993·Granted Sep 24, 1996·8 cites·2 claims
- 1533US4810084ARetinal cameraTOKYO OPTICAL·Filed 1986·Granted Mar 7, 1989·10 cites·13 claims
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