Inventor · disambiguated record
Katsuhisa Fujii
Also filed as: FUJII KATSUHISA
3 granted patents·1 pending application·7 citations·filing 2006–2025
58Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0173US7676296B2Substrate processing system, substrate processing method and computer-readable storage medium storing verification programTOKYO ELECTRON LTD·Filed 2006·Granted Mar 9, 2010·5 cites·4 claims
- 0267US2025332683A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0361US7947926B2Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the methodTOKYO ELECTRON LTD·Filed 2007·Granted May 24, 2011·2 cites·24 claims
- 0447US12377519B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 5, 2025·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →